CVD & PECVD electric Lab High Temperature Vertical Sliding
Rotary Tube Furnace
It’s used for CVD experiment in wide variety of reaction
temperature about 1100℃ ,for vacuum sintering,vacuum sintering
atmosphere,nano materials making,battery material preparation and
other many research fields.
1.1200℃ maximum operating temperature.
2.Heating element: Resistance wire.
3.Double layers forced air cooling structure,the temperature is
less than 60℃.
4.PID automatic control via SCR(silicon controlled rectifier)power
control with phase angle fired,current limiting resistor.
5. 30 or 50 segments“time-temperature curve”can be set arbitrarily.
6. Temperature accuracy: ±1℃
7. Touch Screen control
Furnace tube 1 piece
Vacuum flange 1 set
Tube blockage 1 Pair
O-Ring 4 pieces
Crucible hook 1 piece
Thick-walled silicone tube
Vacuum pump 1set
Mass flow controller 1 set
Plasma source 1set
User manual 1 book
Multi heating zones for furnace
Float flowmeter or mass flowmete.
Bellows KF infterfaces
KF fast access.
Sliding function for tube furnace
Max.temperature : 1200℃ for short time
Continuous working temperature : ≤1100℃
Standard Heating zone length: 205mm/350mm/440mm(Welcome OEM,ODM)
Standard Tube diameter:∮40mm/∮60mm/∮80mm/∮100mm(Welcome OEM,ODM).
Heating element: Resistance wire
Temperature control: 30segments PID automatic control
Thermal couple: K type
Chamber material: Alumina ceramic fiber
Heating rate:0-20℃/min(Suggestion 0~10°C/min)
Temperature control accuracy:±1℃
Temperature uniformity: ±5℃
Power supply: 110-450V,50/60HZ
Technical Parameters of PECD equipment
|Plit Tube furnace|
- Input power: 208 – 240V AC, 1.2kW
- 1200°C Max. working temperature for < 60 minutes
- 1100°C Max for continuous heating
- 30 segments programmable precision digital temperature controller
- feedthrough and a needle valve.
- AC 220V 50 Hz 1/2HP 375W
- 2 Liter /S or 120 liter/m
- Oil trap (inlet) and exhaust filter (outlet) are installed.
- Max. vacuum: 10-2 torr
One year limited warranty with lift time support (Consumable parts such
as processing tubes, o-rings and heating elements are not covered
by the warranty, please order the eplacement at related products below.)